Russell J. Low

Axcelis Technologies Inc. (ACLS)
     MA
Total Compensation for Fiscal Year Ending in 2023: $4,135,438
Salary $530,102
Bonus $0
Value of Stock Awards $3,076,368
Value of Option Awards $0
Non-Equity Incentive Plan Compensation $519,068
Change in Pension Value and Deferred Compensation Earnings $0
All Other Compensation $9,900
Total $4,135,438
Axcelis Technologies Inc. disclosed its CEO pay was
48
times its median employee's pay for the fiscal year ending in 2023.
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